DocumentCode :
1315658
Title :
A Dynamic Model of a High-Temperature Arc Lamp
Author :
Halliop, Basia ; Dawson, Francis P. ; Pugh, Mary C.
Author_Institution :
Dept. of Electr. & Comput. Eng., Univ. of Toronto, Toronto, ON, Canada
Volume :
46
Issue :
6
fYear :
2010
Firstpage :
2233
Lastpage :
2242
Abstract :
High-temperature high-pressure arc lamps are used to thermally process semiconductor wafers. An accurate dynamic model that links the radiation output to the current input would facilitate the design of a power circuit that optimizes energy transfer to the arc. In this paper, a dynamic arc model is derived using averaging of the energy balance equation over spatial domains. This space averaging approach (the “finite-volume method”) accurately models the energy balance equation, as tested with both steady and transient arc currents, including high-energy pulses with a current amplitude range from 400 A to 27 kA and a pulsewidth of a millisecond or less.
Keywords :
arc lamps; current 400 A to 27 kA; dynamic arc model; energy balance equation; high temperature arc lamp; thermally process semiconductor wafer; Approximation methods; Capacitance; Capacitors; Equations; Integrated circuit modeling; Mathematical model; Semiconductor device modeling; Arc lamp; finite-volume method (FVM);
fLanguage :
English
Journal_Title :
Industry Applications, IEEE Transactions on
Publisher :
ieee
ISSN :
0093-9994
Type :
jour
DOI :
10.1109/TIA.2010.2074174
Filename :
5565547
Link To Document :
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