Title :
Editorial Special Section on the 2011 International Conference on Microelectronic Test Structures
Author_Institution :
Università Degli Studi di Udine, Udine, Italy
Abstract :
The six papers in this special section are extended papers from the 2011 International Conference on Microelectronic Test Structures, held in Amsterdam, The Netherlands. The papers cover new advances in variation and stress characterization for complementary metal-oxide-semiconductor technology, improved parameter extraction techniques, and new test structures for process, doping, and temperature characterization.
Keywords :
CMOS technology; Integrated circuit modeling; Microelectronics; Semiconductor device modeling; Special issues and sections;
Journal_Title :
Semiconductor Manufacturing, IEEE Transactions on
DOI :
10.1109/TSM.2012.2217012
