DocumentCode
1315913
Title
Editorial Special Section on the 2011 International Conference on Microelectronic Test Structures
Author
Selmi, Luca
Author_Institution
Università Degli Studi di Udine, Udine, Italy
Volume
25
Issue
4
fYear
2012
Firstpage
541
Lastpage
541
Abstract
The six papers in this special section are extended papers from the 2011 International Conference on Microelectronic Test Structures, held in Amsterdam, The Netherlands. The papers cover new advances in variation and stress characterization for complementary metal-oxide-semiconductor technology, improved parameter extraction techniques, and new test structures for process, doping, and temperature characterization.
Keywords
CMOS technology; Integrated circuit modeling; Microelectronics; Semiconductor device modeling; Special issues and sections;
fLanguage
English
Journal_Title
Semiconductor Manufacturing, IEEE Transactions on
Publisher
ieee
ISSN
0894-6507
Type
jour
DOI
10.1109/TSM.2012.2217012
Filename
6329541
Link To Document