Title :
Reduction of DC drift in LiNbO3 waveguide electro-optic devices by phosphorus doping in SiO2 buffer layer
Author :
Suhara, Toshiaki ; Fujimura, Makoto ; Kinoshita, Keizo ; Nishihara, Hideaki
Author_Institution :
Dept. of Electron., Osaka Univ., Japan
Abstract :
Phosphorus doping in SiO2 buffer layer remarkably reduces the short-time DC drift (relaxation time 3 waveguide EO diffraction modulator. It is supposed that the drift reduction is associated with the gettering effect of P2O5 for mobile charges in the buffer layer and at the buffer/LiNbO3 interface.
Keywords :
electro-optical devices; getters; integrated optics; lithium compounds; optical waveguide components; phosphorus compounds; silicon compounds; LiNbO 3; SiO 2 buffer layer; SiO 2:P 2O 5-LiNbO 3:Ti; drift reduction; gettering effect; mobile charges gettering; short-time DC drift; waveguide electro-optic devices;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19900905