Title :
BCB film based SAW humidity sensor
Author :
Liu, Yanbing ; Wang, C.H. ; Li, Yuhua
Author_Institution :
Coll. of Eng., Swansea Univ., Swansea, UK
Abstract :
Novel benzocyclobutene (BCB) film based surface acoustic wave (SAW) humidity sensors were successfully designed and fabricated. A sensitivity of 0.26 dB/RH was successfully demonstrated between 8.6 and 90.6 relative humidity (RH), with a linear relationship between RH level and resonance amplitude. The temperature stability of resonance frequency and amplitude has also been studied.
Keywords :
humidity sensors; surface acoustic wave sensors; BCB film based SAW humidity sensor; RH level; benzocyclobutene film; relative humidity; resonance amplitude; resonance frequency; surface acoustic wave humidity sensor; temperature stability;
Journal_Title :
Electronics Letters
DOI :
10.1049/el.2011.2078
