DocumentCode
1316683
Title
BCB film based SAW humidity sensor
Author
Liu, Yanbing ; Wang, C.H. ; Li, Yuhua
Author_Institution
Coll. of Eng., Swansea Univ., Swansea, UK
Volume
47
Issue
18
fYear
2011
Firstpage
1012
Lastpage
1014
Abstract
Novel benzocyclobutene (BCB) film based surface acoustic wave (SAW) humidity sensors were successfully designed and fabricated. A sensitivity of 0.26 dB/RH was successfully demonstrated between 8.6 and 90.6 relative humidity (RH), with a linear relationship between RH level and resonance amplitude. The temperature stability of resonance frequency and amplitude has also been studied.
Keywords
humidity sensors; surface acoustic wave sensors; BCB film based SAW humidity sensor; RH level; benzocyclobutene film; relative humidity; resonance amplitude; resonance frequency; surface acoustic wave humidity sensor; temperature stability;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el.2011.2078
Filename
6012943
Link To Document