Beam-adjustment-free crosstalk reduction in 10 GHz-spaced arrayed-waveguide grating via photosensitivity under UV laser irradiation through metal mask

Author

Takada, Kazumasa ; Tanaka, T. ; Abe, Makoto ; Yanagisawa, T. ; Ishii, M. ; Okamoto, K.

Author_Institution

Photonics Labs., NTT Corp., Ibaraki, Japan

Volume

36

Issue

1

fYear

2000

fDate

1/6/2000 12:00:00 AM

Firstpage

60

Lastpage

61

Abstract

The crosstalk of a 10 GHz-spaced 32 channel arrayed-waveguide grating has been reduced from -17 to -30 dB and from -16 to -27 dB for the TE and TM modes, respectively, via the photosensitivity under 193 nm ArF excimer laser irradiation. A metal mask with a window was placed on the arrayed waveguides and the unmasked arrayed waveguides were irradiated until the crosstalk was reduced to the desired value. This technique means that fine adjustment of the laser beam on individual arrayed waveguides is no longer necessary

Keywords

diffraction gratings; integrated optics; laser beam effects; laser beams; masks; optical arrays; optical crosstalk; optical waveguides; 193 nm; 32 channel arrayed-waveguide grating; ArF; ArF excimer laser irradiation; GHz-spaced arrayed-waveguide grating; TE modes; TM modes; UV laser irradiation; arrayed waveguides; beam-adjustment-free crosstalk reduction; fine adjustment; individual arrayed waveguides; laser beam; metal mask; photosensitivity; unmasked arrayed waveguides;

fLanguage

English

Journal_Title

Electronics Letters

Publisher

iet

ISSN

0013-5194

Type

jour

DOI

10.1049/el:20000021

Filename

830518