Title :
Fano-Resonance Photonic Crystal Membrane Reflectors at Mid- and Far-Infrared
Author :
Yichen Shuai ; Deyin Zhao ; Medhi, G. ; Peale, R. ; Zhenqiang Ma ; Buchwald, Walter ; Soref, Richard ; Weidong Zhou
Author_Institution :
Dept. of Electr. Eng., Univ. of Texas at Arlington, Arlington, TX, USA
Abstract :
We report here single-layer ultracompact Fano-resonance photonic crystal membrane reflectors (MRs) at mid-infrared (IR) and far-IR (FIR) bands, based on single layer crystalline Si membranes. High-performance reflectors were designed for surface-normal incidence illumination with center operation wavelengths up to the 75-μm FIR spectral band. Large-area patterned MRs were also fabricated and transferred onto glass substrates based on membrane transfer processes. Close to 100% reflection was obtained at the ~ 76-μm spectral band, with a single-layer Si membrane thickness of 18 μm. Such Fano-resonance-based membranes reflectors offer great opportunities for high-performance ultracompact dielectric reflectors at IR and THz regions.
Keywords :
elemental semiconductors; infrared spectra; membranes; optical design techniques; optical elements; optical fabrication; photoemission; photonic crystals; silicon; silicon-on-insulator; submillimetre wave spectra; FIR spectral band; Fano-resonance photonic crystal membrane reflectors; Si; far-IR band; membrane transfer processes; midinfrared band; single layer crystalline silicon membranes; size 18 mum; surface-normal incidence illumination; ultracompact dielectric reflectors; Glass; Photonic crystals; Photonics; Reflection; Silicon; Substrates; Wavelength measurement; Fano resonance; infrared photonics; membrane reflectors; photonic crystals; silicon photonics;
Journal_Title :
Photonics Journal, IEEE
DOI :
10.1109/JPHOT.2013.2240446
