DocumentCode :
13222
Title :
An Experimental and Theoretical Investigation of a Micromirror Under Mixed-Frequency Excitation
Author :
Ilyas, Saad ; Ramini, Abdallah ; Arevalo, Arpys ; Younis, Mohammad I.
Author_Institution :
King Abdullah Univ. of Sci. & Technol., Thuwal, Saudi Arabia
Volume :
24
Issue :
4
fYear :
2015
fDate :
Aug. 2015
Firstpage :
1124
Lastpage :
1131
Abstract :
We present an experimental and theoretical investigation of a micromachined mirror under a mixed-frequency signal composed of two harmonic ac sources. The micromirror is made of polyimide as the main structural layer. The experimental and theoretical dynamics are explored via frequency sweeps in the desired neighborhoods. One frequency is fixed while the other frequency is swept through a wide range to study the dynamic responses. To simulate the behavior of the micromirror, it is modeled as a single degree of freedom system, where the parameters of the model are extracted experimentally. A good agreement is reported among the simulation results and the experimental data. These responses are studied under different frequencies and input voltages. The results show interesting dynamics, where the system exhibits primary resonance and combination resonances of additive and subtractive type. The mixed excitation is demonstrated as a way to increase the bandwidth of the resonator near primary resonance, which can be promising for resonant sensing applications in the effort to increase the signal-noise ratio over extended frequency range.
Keywords :
micromachining; micromirrors; degree of freedom system; dynamic responses; extended frequency range; frequency sweeps; harmonic ac sources; main structural layer; micromachined mirror; micromirror; mixed-frequency excitation; mixed-frequency signal; primary resonance; signal-noise ratio; Additives; Electrodes; Fabrication; Frequency response; Micromechanical devices; Mirrors; Resonant frequency; Micro mirror; bandwidth; bandwidth.; electrostatic actuation; mixed-frequency excitation; multi-frequency excitation; polyimide; resonators;
fLanguage :
English
Journal_Title :
Microelectromechanical Systems, Journal of
Publisher :
ieee
ISSN :
1057-7157
Type :
jour
DOI :
10.1109/JMEMS.2014.2386285
Filename :
7006680
Link To Document :
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