Title :
Modeling and Design of Magnetoelastic Micro-Resonator System for Ultrasensitive Mass Sensing Applications
Author :
Xue, Cong ; Li, Xinxin ; Yang, Chen
Author_Institution :
State Key Lab. of Transducer Technol., Shanghai Inst. of Microsyst. & Inf. Technol., Shanghai, China
Abstract :
We report a systematic theoretical investigation on magnetoelastic (ME) micro-resonator sensing system. The system, composed of ME micro-resonator immersed in target liquid and excitation/test coil with network analyzer, features as a wireless sensing mode, which enables the real-time high-sensitivity pathogen detection. A detailed four-step modeling methodology and a new equivalent circuit model for the sensing system are developed, with the system design, simulation, optimization, and experimental validation. Influences of various magnetostrictive materials, resonating structures, and excitation/test coils design on system sensing performance are discussed, revealing systematic design guidelines on real ME micro-resonator system for ultrasensitive mass-sensing applications.
Keywords :
equivalent circuits; micromechanical resonators; microsensors; network analysers; wireless sensor networks; equivalent circuit model; excitation/test coil; four-step modeling methodology; magnetoelastic microresonator system; magnetostrictive materials; network analyzer; real-time high-sensitivity pathogen detection; resonating structures; system sensing performance; target liquid; ultrasensitive mass sensing applications; wireless sensing mode; Amorphous magnetic materials; Integrated circuit modeling; Magnetic liquids; Magnetic resonance; Magnetoacoustic effects; Magnetostriction; Sensors; Equivalent circuit; magnetoelastic; mass sensing; micro-resonator;
Journal_Title :
Magnetics, IEEE Transactions on
DOI :
10.1109/TMAG.2012.2199479
