Title :
Sub-micron camera for interdigital transducer fabrication
Author :
Gregoris, D. ; Ristic, V.M.
Author_Institution :
Dept. of Electr. Eng., Toronto Univ., Ont., Canada
Abstract :
Describes the structure and operation of a submicron resolution camera system for fabricating high frequency interdigital electrode transducers (IDTs). A high resolution, 10× reduction lens is central to the system which produces IDTs by direct optical projection lithography. The camera resolution was determined experimentally to be approximately 0.75 μm. The system was subsequently used to fabricate a modified chirp transducer with linewidths ranging from 1 μm to 2.4 μm.
Keywords :
cameras; photolithography; transducers; SAW; interdigital electrode transducers; interdigital transducer fabrication; modified chirp transducer; optical projection lithography; photolithography camera; reduction lens; submicron resolution camera; Cameras; Electrodes; Fabrication; Optical filters; Optical surface waves; Substrates; Transducers;
Journal_Title :
Electrical Engineering Journal, Canadian
DOI :
10.1109/CEEJ.1985.6593138
