Microwave Discharge as an Effective Tool for Surface Treatment of Small Samples

Plasma created in different gases using conventional microwave (MW) discharge is presented. The discharge chamber is a quartz tube mounted into a rectangular waveguide. Standing-wave conditions established in the MW cavity allow for creation of plasma in a small volume. The discharge power up to 1200 W allows for treatment of small samples with rather intense plasma. Samples mounted on sample holders with poor thermal contact with cold materials are heated to elevated temperature that allows for intensive surface chemical reactions. Plasma color depends on the type of gas and impurities released from samples as a result of plasma treatment.