Title :
An eight-terminal Kelvin-tapped bipolar transistor for extracting parasitic series resistances
Author :
Taft, Robert C. ; Plummer, James D.
Author_Institution :
Center for Integrated Syst., Stanford Univ., CA, USA
fDate :
9/1/1991 12:00:00 AM
Abstract :
A novel DC method for determining the components of series resistance in bipolar transistors is presented. As a DC technique, it shows unprecedented accuracy as demonstrated by its application to both metal-contacted heterojunction transistors and more conventional bipolar junction transistors (BJTs). The measurement error was minimized by using a single double-base Kelvin-tapped transistor to extract all components of series resistance. This extraction technique was applied to transistors from an industrial poly-contacted BJT process with various geometries. The authors describe the theory and application of this extraction technique in both its simplified form, where the emitter resistance is assumed to be lumped and bias-independent, and in its more general form, where it includes the distributed nature of both the emitter and the intrinsic base resistances. An exact expression for the DC and AC bias-dependent intrinsic base resistance and a methodology for calculating effective resistances for bipolar devices are presented
Keywords :
bipolar transistors; electric resistance measurement; equivalent circuits; measurement errors; semiconductor device models; semiconductor device testing; DC method; HBT; Kelvin-tapped bipolar transistor; base resistances; bipolar junction transistors; eight terminal device; emitter resistance; measurement error; metal-contacted heterojunction transistors; parasitic series resistances; poly-contacted BJT process; Bipolar transistors; Computational Intelligence Society; Contact resistance; Electrical resistance measurement; Geometry; Heterojunction bipolar transistors; Measurement errors; Process control; Virtual colonoscopy; Voltage;
Journal_Title :
Electron Devices, IEEE Transactions on