DocumentCode :
1325019
Title :
Experimental Study of Breakdown Time in a Pulsed 2.45-GHz ECR Hydrogen Plasma Reactor
Author :
Cortázar, O. Daniel ; Megía-Macías, Ana ; Vizcaíno-de-Julián, Alvaro
Author_Institution :
Univ. of Castilla-La Mancha, Ciudad Real, Spain
Volume :
40
Issue :
12
fYear :
2012
Firstpage :
3409
Lastpage :
3419
Abstract :
An electron cyclotron resonance (ECR) plasma reactor developed at the European Spallation Source Bilbao has been operated in pulsed mode at 50 Hz to study the breakdown-process dynamics by time-resolved diagnostics. Injected power, reflected power, electrical-biased probe saturation current, and light emission were measured simultaneously for three different magnetic fields: under ECR, ECR, and asymmetric over ECR profiles. Gas pressure, power, and duty cycle have been used in a parametric study obtaining information about microwave (MW) coupling and plasma formation stages during the breakdown process. The study is relevant for designers that need to extract short beam pulses from a 2.45 ECR ion source for any application because the total breakdown time measured is defined as corresponding to reach the steady-state plasma parameters. A simple model of residual electron density evolution between pulses is proposed to describe the MW coupling as a function of incoming power and duty cycles.
Keywords :
cyclotron resonance; electric breakdown; hydrogen; plasma density; plasma devices; plasma diagnostics; plasma sources; ECR ion source; European Spallation Source Bilbao; beam pulse; breakdown process; breakdown time; breakdown-process dynamics; electrical-biased probe saturation current; electron cyclotron resonance plasma reactor; frequency 2.45 GHz; frequency 50 Hz; gas pressure; injected power; light emission; microwave coupling; plasma formation; pulsed ECR hydrogen plasma reactor; reflected power; residual electron density evolution; steady-state plasma parameter; time-resolved diagnostics; Electric breakdown; Hydrogen; Magnetic field measurement; Plasma measurements; Plasma sources; Plasmas; Electron cyclotron resonance (ECR) plasma source; plasma breakdown; pulsed ECR ion source;
fLanguage :
English
Journal_Title :
Plasma Science, IEEE Transactions on
Publisher :
ieee
ISSN :
0093-3813
Type :
jour
DOI :
10.1109/TPS.2012.2222933
Filename :
6336831
Link To Document :
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