• DocumentCode
    1325019
  • Title

    Experimental Study of Breakdown Time in a Pulsed 2.45-GHz ECR Hydrogen Plasma Reactor

  • Author

    Cortázar, O. Daniel ; Megía-Macías, Ana ; Vizcaíno-de-Julián, Alvaro

  • Author_Institution
    Univ. of Castilla-La Mancha, Ciudad Real, Spain
  • Volume
    40
  • Issue
    12
  • fYear
    2012
  • Firstpage
    3409
  • Lastpage
    3419
  • Abstract
    An electron cyclotron resonance (ECR) plasma reactor developed at the European Spallation Source Bilbao has been operated in pulsed mode at 50 Hz to study the breakdown-process dynamics by time-resolved diagnostics. Injected power, reflected power, electrical-biased probe saturation current, and light emission were measured simultaneously for three different magnetic fields: under ECR, ECR, and asymmetric over ECR profiles. Gas pressure, power, and duty cycle have been used in a parametric study obtaining information about microwave (MW) coupling and plasma formation stages during the breakdown process. The study is relevant for designers that need to extract short beam pulses from a 2.45 ECR ion source for any application because the total breakdown time measured is defined as corresponding to reach the steady-state plasma parameters. A simple model of residual electron density evolution between pulses is proposed to describe the MW coupling as a function of incoming power and duty cycles.
  • Keywords
    cyclotron resonance; electric breakdown; hydrogen; plasma density; plasma devices; plasma diagnostics; plasma sources; ECR ion source; European Spallation Source Bilbao; beam pulse; breakdown process; breakdown time; breakdown-process dynamics; electrical-biased probe saturation current; electron cyclotron resonance plasma reactor; frequency 2.45 GHz; frequency 50 Hz; gas pressure; injected power; light emission; microwave coupling; plasma formation; pulsed ECR hydrogen plasma reactor; reflected power; residual electron density evolution; steady-state plasma parameter; time-resolved diagnostics; Electric breakdown; Hydrogen; Magnetic field measurement; Plasma measurements; Plasma sources; Plasmas; Electron cyclotron resonance (ECR) plasma source; plasma breakdown; pulsed ECR ion source;
  • fLanguage
    English
  • Journal_Title
    Plasma Science, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0093-3813
  • Type

    jour

  • DOI
    10.1109/TPS.2012.2222933
  • Filename
    6336831