DocumentCode
1325019
Title
Experimental Study of Breakdown Time in a Pulsed 2.45-GHz ECR Hydrogen Plasma Reactor
Author
Cortázar, O. Daniel ; Megía-Macías, Ana ; Vizcaíno-de-Julián, Alvaro
Author_Institution
Univ. of Castilla-La Mancha, Ciudad Real, Spain
Volume
40
Issue
12
fYear
2012
Firstpage
3409
Lastpage
3419
Abstract
An electron cyclotron resonance (ECR) plasma reactor developed at the European Spallation Source Bilbao has been operated in pulsed mode at 50 Hz to study the breakdown-process dynamics by time-resolved diagnostics. Injected power, reflected power, electrical-biased probe saturation current, and light emission were measured simultaneously for three different magnetic fields: under ECR, ECR, and asymmetric over ECR profiles. Gas pressure, power, and duty cycle have been used in a parametric study obtaining information about microwave (MW) coupling and plasma formation stages during the breakdown process. The study is relevant for designers that need to extract short beam pulses from a 2.45 ECR ion source for any application because the total breakdown time measured is defined as corresponding to reach the steady-state plasma parameters. A simple model of residual electron density evolution between pulses is proposed to describe the MW coupling as a function of incoming power and duty cycles.
Keywords
cyclotron resonance; electric breakdown; hydrogen; plasma density; plasma devices; plasma diagnostics; plasma sources; ECR ion source; European Spallation Source Bilbao; beam pulse; breakdown process; breakdown time; breakdown-process dynamics; electrical-biased probe saturation current; electron cyclotron resonance plasma reactor; frequency 2.45 GHz; frequency 50 Hz; gas pressure; injected power; light emission; microwave coupling; plasma formation; pulsed ECR hydrogen plasma reactor; reflected power; residual electron density evolution; steady-state plasma parameter; time-resolved diagnostics; Electric breakdown; Hydrogen; Magnetic field measurement; Plasma measurements; Plasma sources; Plasmas; Electron cyclotron resonance (ECR) plasma source; plasma breakdown; pulsed ECR ion source;
fLanguage
English
Journal_Title
Plasma Science, IEEE Transactions on
Publisher
ieee
ISSN
0093-3813
Type
jour
DOI
10.1109/TPS.2012.2222933
Filename
6336831
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