Title :
Two-dimensional fluid model simulation of bell jar top inductively coupled plasma
Author :
Wu, Han-Ming ; Yu, Ben W. ; Li, Ming ; Yang, Yun
Author_Institution :
CFD Res. Corp., Huntsville, AL, USA
fDate :
2/1/1997 12:00:00 AM
Abstract :
In the present paper, argon (Ar) plasmas in a bell jar inductively coupled plasma (ICP) source are systematically studied over pressures from 5 to 20 mtorr and power inputs from 0.2 to 0.5 kW. In this study, both a two-dimensional (2-D) fluid model simulation and global model calculation are compared. The 2-D fluid model simulation with a self-consistent power deposition is developed to describe the Ar plasma behaviour as well as predict the plasma parameter distributions. Finally, a quantitative comparison between the global model and the fluid model is made to test their validity
Keywords :
argon; plasma properties; plasma radiofrequency heating; plasma simulation; 0.2 to 0.5 kW; 2D fluid model simulation; 5 to 20 mtorr; Ar; Ar plasmas; bell jar top inductively coupled plasma; global model calculation; plasma parameter distributions; two-dimensional fluid model simulation; Argon; Electrons; Etching; Plasma applications; Plasma density; Plasma simulation; Plasma sources; Power system modeling; Predictive models; Radio frequency;
Journal_Title :
Plasma Science, IEEE Transactions on
