Two-dimensional fluid model simulation of bell jar top inductively coupled plasma

Author

Wu, Han-Ming ; Yu, Ben W. ; Li, Ming ; Yang, Yun

Author_Institution

CFD Res. Corp., Huntsville, AL, USA

Volume

25

Issue

1

fYear

1997

fDate

2/1/1997 12:00:00 AM

Firstpage

1

Lastpage

6

Abstract

In the present paper, argon (Ar) plasmas in a bell jar inductively coupled plasma (ICP) source are systematically studied over pressures from 5 to 20 mtorr and power inputs from 0.2 to 0.5 kW. In this study, both a two-dimensional (2-D) fluid model simulation and global model calculation are compared. The 2-D fluid model simulation with a self-consistent power deposition is developed to describe the Ar plasma behaviour as well as predict the plasma parameter distributions. Finally, a quantitative comparison between the global model and the fluid model is made to test their validity

Keywords

argon; plasma properties; plasma radiofrequency heating; plasma simulation; 0.2 to 0.5 kW; 2D fluid model simulation; 5 to 20 mtorr; Ar; Ar plasmas; bell jar top inductively coupled plasma; global model calculation; plasma parameter distributions; two-dimensional fluid model simulation; Argon; Electrons; Etching; Plasma applications; Plasma density; Plasma simulation; Plasma sources; Power system modeling; Predictive models; Radio frequency;

fLanguage

English

Journal_Title

Plasma Science, IEEE Transactions on

Publisher

ieee

ISSN

0093-3813

Type

jour

DOI

10.1109/27.557479

Filename

557479