Travelling-wave piezoelectric micropump with low resistance microchannel

Driven by a travelling wave, a piezoelectric micropump with a sawtooth microchannel is presented. An easy fabrication method is proposed, and the characteristics of the micropump are tested at different frequencies. Compared to the micropump with a straight microchannel, the micropump with a sawtooth microchannel has higher flow rate and back pressure (33.36 l/min and 1.13 kPa) at low voltage because of the low resistance of the microchannel. Meanwhile, the relationship of the flow rate to the back pressure of the micropump is in inverse proportion.