SOLIDIS: a tool for microactuator simulation in 3-D

Author

Funk, Jorg M. ; Korvink, J.G. ; Buhler, Johannes ; Bachtold, Martin ; Baltes, Henry

Author_Institution

Phys. Electron. Lab., Eidgenossische Tech. Hochschule, Zurich, Switzerland

Volume

6

Issue

1

fYear

1997

fDate

3/1/1997 12:00:00 AM

Firstpage

70

Lastpage

82

Abstract

SOLIDIS is an engineering software tool tailored for the coupled three-dimensional (3-D) analysis of microactuators. Surface electrostatic forces, thermomechanics, and piezoelectric effects are correctly treated. The solution algorithms implemented enable efficient and accurate static analysis and optimization of MEMS actuators. Adaptive mesh refinement results in near-optimal meshes in the sense of achieving maximum accuracy for a given number of mesh nodes. A zone partitioning scheme permits efficient simulation of complex actuator structures. Additional key issues are mesh updating using a Monte Carlo algorithm to account for the actuator´s movement and the application of smoothing algorithms for the extraction of accurate electrostatic forces

Keywords

Monte Carlo methods; digital simulation; finite element analysis; microactuators; smoothing methods; MEMS actuator; Monte Carlo algorithm; SOLIDIS; adaptive mesh refinement; coupled analysis; engineering software tool; microactuator; optimization; piezoelectric effects; smoothing algorithm; static analysis; surface electrostatic forces; thermomechanics; three-dimensional simulation; zone partitioning; Actuators; Algorithm design and analysis; Electrostatics; Microactuators; Partitioning algorithms; Piezoelectric effect; Software tools; Solid modeling; Surface treatment; Thermomechanical processes;

fLanguage

English

Journal_Title

Microelectromechanical Systems, Journal of

Publisher

ieee

ISSN

1057-7157

Type

jour

DOI

10.1109/84.557533

Filename

557533