• DocumentCode
    1326699
  • Title

    The scanning electron microscope

  • Author

    Pease, R.F.W.

  • Author_Institution
    University, of California, Berkeley
  • Volume
    4
  • Issue
    10
  • fYear
    1967
  • Firstpage
    96
  • Lastpage
    102
  • Abstract
    The scanning electron microscope combines the techniques of the cathode-ray tube and the conventional electron microscope¿both considered indispensable to modern technology. The SEM, which presents a picture having a distinct three-dimensional appearance, is finding application in the examination of wood fibers in connection with paper manufacture, of surfaces undergoing ionic bombardment, and of corrosion. At the present time, one of the most pressing problems is to reduce its total cost.
  • Keywords
    Anodes; Blanking; Cathode ray tubes; Current density; Electron beams; Electron sources; Instruments; Lenses; Scanning electron microscopy; Surface topography;
  • fLanguage
    English
  • Journal_Title
    Spectrum, IEEE
  • Publisher
    ieee
  • ISSN
    0018-9235
  • Type

    jour

  • DOI
    10.1109/MSPEC.1967.5217128
  • Filename
    5217128
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1326699