Statistical control of VLSI fabrication processes

Author

Mozumder, Purnendu K. ; Strojwas, Andrzej J.

Author_Institution

Texas Instrum. Inc., Dallas, TX, USA

Volume

14

Issue

3

fYear

1991

fDate

9/1/1991 12:00:00 AM

Firstpage

467

Lastpage

475

Abstract

The authors propose a profit-based framework for an integrated CAD-CAM system for VLSI design and manufacturing. The inefficiencies of present-day CAM systems are due to the lack of appropriate methodologies for process monitoring and statistical techniques to analyze the in-process and end-of-process data. Methodologies for monitoring lots in fabrication lines using in situ measurements and controlling lots using the multivariate distribution of observable in-process parameters were developed. The software system which implements the algorithms has shown encouraging results when applied to industrial fabrication lines

Keywords

CAD/CAM; VLSI; integrated circuit manufacture; process computer control; statistical process control; VLSI design; VLSI fabrication processes; controlling lots; end-of-process data; in situ measurements; in-process data; industrial fabrication lines; integrated CAD-CAM system; monitoring lots in fabrication lines; multivariate distribution of parameters; observable in-process parameters; process monitoring; profit-based framework; statistical control; statistical techniques; CADCAM; Computer aided manufacturing; Computer industry; Condition monitoring; Electrical equipment industry; Fabrication; Software algorithms; Software systems; Textile industry; Very large scale integration;

fLanguage

English

Journal_Title

Components, Hybrids, and Manufacturing Technology, IEEE Transactions on

Publisher

ieee

ISSN

0148-6411

Type

jour

DOI

10.1109/33.83929

Filename

83929