Title :
Statistical control of VLSI fabrication processes
Author :
Mozumder, Purnendu K. ; Strojwas, Andrzej J.
Author_Institution :
Texas Instrum. Inc., Dallas, TX, USA
fDate :
9/1/1991 12:00:00 AM
Abstract :
The authors propose a profit-based framework for an integrated CAD-CAM system for VLSI design and manufacturing. The inefficiencies of present-day CAM systems are due to the lack of appropriate methodologies for process monitoring and statistical techniques to analyze the in-process and end-of-process data. Methodologies for monitoring lots in fabrication lines using in situ measurements and controlling lots using the multivariate distribution of observable in-process parameters were developed. The software system which implements the algorithms has shown encouraging results when applied to industrial fabrication lines
Keywords :
CAD/CAM; VLSI; integrated circuit manufacture; process computer control; statistical process control; VLSI design; VLSI fabrication processes; controlling lots; end-of-process data; in situ measurements; in-process data; industrial fabrication lines; integrated CAD-CAM system; monitoring lots in fabrication lines; multivariate distribution of parameters; observable in-process parameters; process monitoring; profit-based framework; statistical control; statistical techniques; CADCAM; Computer aided manufacturing; Computer industry; Condition monitoring; Electrical equipment industry; Fabrication; Software algorithms; Software systems; Textile industry; Very large scale integration;
Journal_Title :
Components, Hybrids, and Manufacturing Technology, IEEE Transactions on
