Title :
Desorption of moisture from stainless steel tubes and alumina filters in high purity gas distribution systems
Author :
Haider, Asad M. ; Shadman, Farhang
Author_Institution :
Arizona Univ., Tucson, AZ, USA
fDate :
9/1/1991 12:00:00 AM
Abstract :
The mechanism of moisture desorption from both stainless steel and 80% alumina surfaces is studied. A difficulty associated with moisture is its strong adsorption on various gas distribution surfaces and its slow desorption due to a very high activation energy. A unique experimental setup to determine desorption under gas flow conditions by monitoring the moisture concentration at the system outlet is described. A simple analytical technique is presented to analyze the desorption data so acquired, in an effort to normalize the results and thus making them system independent. Desorption rate constants for stainless steel and ceramic (80% alumina) surfaces are calculated using this model at a constant temperature
Keywords :
alumina; desorption; integrated circuit manufacture; moisture; stainless steel; Al2O3 surfaces; H2O desorption; IC manufacture technology; desorption under gas flow conditions; high purity gas distribution systems; moisture desorption mechanism; stainless steel tubes; Data analysis; Filters; Fluid flow; Gas detectors; Gases; Kinetic theory; Moisture; Steel; Surface contamination; Valves;
Journal_Title :
Components, Hybrids, and Manufacturing Technology, IEEE Transactions on
