Desorption of moisture from stainless steel tubes and alumina filters in high purity gas distribution systems

Author

Haider, Asad M. ; Shadman, Farhang

Author_Institution

Arizona Univ., Tucson, AZ, USA

Volume

14

Issue

3

fYear

1991

fDate

9/1/1991 12:00:00 AM

Firstpage

507

Lastpage

511

Abstract

The mechanism of moisture desorption from both stainless steel and 80% alumina surfaces is studied. A difficulty associated with moisture is its strong adsorption on various gas distribution surfaces and its slow desorption due to a very high activation energy. A unique experimental setup to determine desorption under gas flow conditions by monitoring the moisture concentration at the system outlet is described. A simple analytical technique is presented to analyze the desorption data so acquired, in an effort to normalize the results and thus making them system independent. Desorption rate constants for stainless steel and ceramic (80% alumina) surfaces are calculated using this model at a constant temperature

Keywords

alumina; desorption; integrated circuit manufacture; moisture; stainless steel; Al₂O₃ surfaces; H₂O desorption; IC manufacture technology; desorption under gas flow conditions; high purity gas distribution systems; moisture desorption mechanism; stainless steel tubes; Data analysis; Filters; Fluid flow; Gas detectors; Gases; Kinetic theory; Moisture; Steel; Surface contamination; Valves;

fLanguage

English

Journal_Title

Components, Hybrids, and Manufacturing Technology, IEEE Transactions on

Publisher

ieee

ISSN

0148-6411

Type

jour

DOI

10.1109/33.83935

Filename

83935