DocumentCode
1327214
Title
High-speed electret charging using vacuum UV photoionization [Reprint]
Author
Honzumi, M. ; Hagiwara, Kazuki ; Iguchi, Yoshinori ; Suzuki, Yuya
Author_Institution
Dept. of Mech. Eng., Univ. of Tokyo, Tokyo, Japan
Volume
27
Issue
5
fYear
2011
Firstpage
62
Lastpage
64
Abstract
In this letter, we propose a high-speed charging method using vacuum ultraviolet (vuv) irradiation, which can increase the charging rate by two orders of magnitudes than corona/soft-x-ray charging methods. So far, vuv has been used for neutralization of electrostatic charge in semiconductor process. However, the large ion current obtained with the VUV irradiation has never been used for charging electrets.
Keywords
electrets; photoionisation; ultraviolet radiation effects; CYTOP CTL-M electrets; VUV irradiation; electrostatic charge; high-speed charging method; high-speed electret charging; ion current; ionization current; neutralization; semiconductor process; vacuum UV photoionization; vacuum ultraviolet irradiation; Corona; Electrets; Electric potential; Ionization; Radiation effects; Space charge; Surface charging; Ultraviolet sources;
fLanguage
English
Journal_Title
Electrical Insulation Magazine, IEEE
Publisher
ieee
ISSN
0883-7554
Type
jour
DOI
10.1109/MEI.2011.6025372
Filename
6025372
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