Broad-band microwave characterization of bilayered materials using a coaxial discontinuity with applications for thin conductive films for microelectronics and material in air-tight cell

Author

Belhadj-Tahar, Nour-eddine ; Meyer, Olivier ; Fourrier-Lamer, Arlette

Author_Institution

Lab. de Dispositifs Infrarouge et Microondes, Univ. Pierre et Marie Curie, Paris, France

Volume

45

Issue

2

fYear

1997

fDate

2/1/1997 12:00:00 AM

Firstpage

260

Lastpage

267

Abstract

A new measurement method of complex permittivity of bilayered materials has been developed using a coaxial discontinuity. The electromagnetic analysis is performed according to the “mode-matching” method. The reflection coefficient of the principal transverse electromagnetic (TEM) mode is calculated by matching the fields at the interfaces of the layered material and using the orthogonality properties of modes in cylindrical waveguides. The complex permittivity of several known liquid or solid materials in bilayered structure are measured using this method. The experimental results over a wide frequency band (1 kHz-18 GHz) are consistent with those in previous papers and with dc measurements

Keywords

circular waveguides; coaxial waveguides; microwave measurement; mode matching; permittivity measurement; waveguide discontinuities; 1 kHz to 18 GHz; TEM mode; air-tight cell; bilayered material; broadband microwave measurement; coaxial discontinuity; complex permittivity; conductive thin film; cylindrical waveguide; electromagnetic analysis; field matching; liquid material; microelectronics; mode matching; mode orthogonality; reflection coefficient; solid material; Coaxial components; Conducting materials; Electromagnetic measurements; Electromagnetic waveguides; Frequency; Measurement techniques; Microelectronics; Permittivity measurement; Probes; Reflection;

fLanguage

English

Journal_Title

Microwave Theory and Techniques, IEEE Transactions on

Publisher

ieee

ISSN

0018-9480

Type

jour

DOI

10.1109/22.557608

Filename

557608