• DocumentCode
    1327444
  • Title

    Nanofabrication using Coulomb crystals

  • Author

    Bandyopadhyay, S. ; Williams, P.F.

  • Author_Institution
    Dept. of Electr. Eng., Nebraska Univ., Lincoln, NE, USA
  • Volume
    19
  • Issue
    2
  • fYear
    2000
  • Firstpage
    10
  • Lastpage
    15
  • Abstract
    We describe a selective area transfer of a Coulomb crystal. This is the first step towards a hybrid nanofabrication scheme employing both self-assembly and lithography. We have coined a term for this process; we call it "nanoxerography" since that is more or less how a Xerox photocopier machine works. Such techniques can ultimately lead to the marriage of self-assembly with nanolithography
  • Keywords
    lithography; nanotechnology; self-assembly; Coulomb crystal; nanofabrication; nanolithography; nanoxerography; selective area transfer; self-assembly; Chemicals; Crystals; Nanofabrication;
  • fLanguage
    English
  • Journal_Title
    Potentials, IEEE
  • Publisher
    ieee
  • ISSN
    0278-6648
  • Type

    jour

  • DOI
    10.1109/45.839639
  • Filename
    839639
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1327444