Title :
Nanofabrication using Coulomb crystals
Author :
Bandyopadhyay, S. ; Williams, P.F.
Author_Institution :
Dept. of Electr. Eng., Nebraska Univ., Lincoln, NE, USA
Abstract :
We describe a selective area transfer of a Coulomb crystal. This is the first step towards a hybrid nanofabrication scheme employing both self-assembly and lithography. We have coined a term for this process; we call it "nanoxerography" since that is more or less how a Xerox photocopier machine works. Such techniques can ultimately lead to the marriage of self-assembly with nanolithography
Keywords :
lithography; nanotechnology; self-assembly; Coulomb crystal; nanofabrication; nanolithography; nanoxerography; selective area transfer; self-assembly; Chemicals; Crystals; Nanofabrication;
Journal_Title :
Potentials, IEEE
