Title :
The circular resistor (CR)-a novel structure for the analysis of VLSI contacts
Author :
Scorzoni, Andrea ; Vanzi, Massimo ; Querzè, Andrea
Author_Institution :
CNR-Istituto Lamel, Bologna, Italy
fDate :
7/1/1990 12:00:00 AM
Abstract :
The circular resistor, a structure for extracting metal-semiconductor contact resistivity, is discussed. A two-dimensional analytical solution of the system is shown in a simplified case; the complex solution is calculated by numerical simulations. Very good agreement between the two solutions was found. Regarding resolution, the circular resistor exhibits characteristics similar to those of other standard structures, but the circular shape fits the actual geometry of VLSI contacts
Keywords :
VLSI; contact resistance; metallisation; VLSI contacts; circular resistor; circular shape; geometry; metal-semiconductor contact resistivity; numerical simulations; resolution; two-dimensional analytical solution; Analytical models; Conductivity; Contact resistance; Electrical resistance measurement; Equations; Numerical simulation; Resistors; Shape; Testing; Very large scale integration;
Journal_Title :
Electron Devices, IEEE Transactions on
