DocumentCode
1327515
Title
The circular resistor (CR)-a novel structure for the analysis of VLSI contacts
Author
Scorzoni, Andrea ; Vanzi, Massimo ; Querzè, Andrea
Author_Institution
CNR-Istituto Lamel, Bologna, Italy
Volume
37
Issue
7
fYear
1990
fDate
7/1/1990 12:00:00 AM
Firstpage
1750
Lastpage
1757
Abstract
The circular resistor, a structure for extracting metal-semiconductor contact resistivity, is discussed. A two-dimensional analytical solution of the system is shown in a simplified case; the complex solution is calculated by numerical simulations. Very good agreement between the two solutions was found. Regarding resolution, the circular resistor exhibits characteristics similar to those of other standard structures, but the circular shape fits the actual geometry of VLSI contacts
Keywords
VLSI; contact resistance; metallisation; VLSI contacts; circular resistor; circular shape; geometry; metal-semiconductor contact resistivity; numerical simulations; resolution; two-dimensional analytical solution; Analytical models; Conductivity; Contact resistance; Electrical resistance measurement; Equations; Numerical simulation; Resistors; Shape; Testing; Very large scale integration;
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/16.55764
Filename
55764
Link To Document