Plasma Microchannel and Jet Enhanced by an Array of Ellipsoidal Microcavities

Author

Lee, D.-S. ; Sakai, O. ; Park, S.-J. ; Eden, J.G. ; Hamaguchi, S.

Author_Institution

Center for Atomic & Mol. Technol., Osaka Univ., Suita, Japan

Volume

39

Issue

11

fYear

2011

Firstpage

2690

Lastpage

2691

Abstract

Plasma jet discharges are shown to be enhanced significantly, with respect to emission intensity, in the presence of ellipsoidal microcavities dispersed at uniform intervals along the gas flow channel. In these experiments, 25 microcavities were fabricated in the top and bottom faces of a gas flow channel having a rectangular cross section. Conducting film electrodes exterior to the glass structure, powered by a 20-kHz sinusoidal voltage, produced plasma along the entire channel as well as within the microcavities. Stronger optical emission and longer plasma jets were observed in this system than in an equivalent plasma jet system without microcavities.

Keywords

electrodes; glow discharges; microcavities; microchannel flow; microfabrication; plasma diagnostics; plasma flow; plasma jets; plasma production; conducting film electrodes; ellipsoidal microcavity array; emission intensity; frequency 20 kHz; gas flow channel; glass structure; optical emission; plasma jet discharges; plasma microchannel; rectangular cross section; sinusoidal voltage; Arrays; Cavity resonators; Discharges; Glass; Laboratories; Microcavities; Plasmas; Atmospheric-pressure plasma jet; ellipsoidal microcavity array; microplasma;

fLanguage

English

Journal_Title

Plasma Science, IEEE Transactions on

Publisher

ieee

ISSN

0093-3813

Type

jour

DOI

10.1109/TPS.2011.2165561

Filename

6026961