Two-Photon Polymerization System With Diffractive Superresolution Element

Author

Wei, Peng ; Li, Ning ; Feng, Lishuang

Author_Institution

Opto-eletronics Dept., Beijing Univ. of Aeronaut. & Astronaut., Beijing, China

Volume

11

Issue

1

fYear

2011

Firstpage

194

Lastpage

198

Abstract

Two-photon polymerization system has been used to fabricate the 3-D nano- and microscale devices for several years. However, there are still some important issues to be resolved. One of them is the combination of the two-photon polymerization theory and the optical diffraction theory. Based on the two-photon polymerization theory, the laser´s point spread function is analyzed so that their distribution models can be efficiently processed in micromachining. Diffractive superresolution element is introduced in the laser beam to rearrange the point spread function of the focus. Finally, the combination of the diffractive superresolution element and two-photon polymerization experiments are performed.

Keywords

laser beam machining; light diffraction; micromachining; nanofabrication; optical transfer function; polymerisation; two-photon processes; 3D microscale device; 3D nanoscale device; diffractive superresolution element; laser point spread function; micromachining; optical diffraction theory; two-photon polymerization system; Lasers; Optical diffraction; Optical polymers; Optics; Photonics; Spatial resolution; Diffraction; micromachining; resolution; two-photon polymerization;

fLanguage

English

Journal_Title

Sensors Journal, IEEE

Publisher

ieee

ISSN

1530-437X

Type

jour

DOI

10.1109/JSEN.2010.2054077

Filename

5579978