Title :
Millimeter-Wave Power Sensor Based on Silicon Rod Waveguide
Author :
Generalov, Andrey A. ; Lioubtchenko, Dmitri V. ; Mallat, Juha A. ; Ovchinnikov, Victor ; Räisänen, Antti V.
Author_Institution :
Dept. of Radio Sci. & Eng., Aalto Univ., Aalto, Finland
Abstract :
This paper presents a novel type of RF power sensor, based on a metallic structure integrated into an mm-wave range dielectric rod waveguide made of Si. The metallic structure is employed as a bolometer. Numerical simulations of temperature distribution are shown. A prototype was tested at frequencies of 45 GHz-1 THz and a power levels from 0.1 to 500 mW. The power sensor showed the sensitivity of 0.51 Ω/mW resistance change.
Keywords :
bolometers; dielectric waveguides; millimetre wave detectors; rods (structures); submillimetre wave detectors; RF power sensor; Si; bolometer; frequency 45 GHz to 1 THz; metallic structure; millimeter-wave power sensor; mm-wave range dielectric rod waveguide; numerical simulations; power 0.1 mW to 500 mW; rod waveguide; sensitivity; temperature distribution; Bolometers; Electrical resistance measurement; Millimeter wave devices; Power measurement; Semiconductor device measurement; Silicon; Bolometer; THz; dielectric rod waveguide (DRW); millimeter (mm) waves; power sensor;
Journal_Title :
Terahertz Science and Technology, IEEE Transactions on
DOI :
10.1109/TTHZ.2012.2223111
