• DocumentCode
    1330167
  • Title

    Micromotors split hairs-mechanical systems join electronics in the microscopic world

  • Author

    Jacobson, S.C. ; Wood, John E. ; Price, Richard H.

  • Author_Institution
    Utah Univ., Salt Lake City, UT, USA
  • Volume
    10
  • Issue
    1
  • fYear
    1991
  • Firstpage
    12
  • Lastpage
    15
  • Abstract
    The potential benefits of microelectromechanical systems are discussed. The problems that must be resolved in designing such systems are examined. The wobble motor is used to illustrate how innovative design can overcome some of the problems posed. Torque-speed measurements on wobble motors are described, and some potential applications are indicated.<>
  • Keywords
    micromechanical devices; small electric machines; torque measurement; velocity measurement; design; microelectromechanical systems; micromotors; torque-speed measurements; wobble motor; Electrodes; Electron microscopy; Electrostatics; Humans; Logic; Magnetic fields; Micromechanical devices; Micromotors; Muscles; Stators;
  • fLanguage
    English
  • Journal_Title
    Potentials, IEEE
  • Publisher
    ieee
  • ISSN
    0278-6648
  • Type

    jour

  • DOI
    10.1109/45.84061
  • Filename
    84061