DocumentCode
1330167
Title
Micromotors split hairs-mechanical systems join electronics in the microscopic world
Author
Jacobson, S.C. ; Wood, John E. ; Price, Richard H.
Author_Institution
Utah Univ., Salt Lake City, UT, USA
Volume
10
Issue
1
fYear
1991
Firstpage
12
Lastpage
15
Abstract
The potential benefits of microelectromechanical systems are discussed. The problems that must be resolved in designing such systems are examined. The wobble motor is used to illustrate how innovative design can overcome some of the problems posed. Torque-speed measurements on wobble motors are described, and some potential applications are indicated.<>
Keywords
micromechanical devices; small electric machines; torque measurement; velocity measurement; design; microelectromechanical systems; micromotors; torque-speed measurements; wobble motor; Electrodes; Electron microscopy; Electrostatics; Humans; Logic; Magnetic fields; Micromechanical devices; Micromotors; Muscles; Stators;
fLanguage
English
Journal_Title
Potentials, IEEE
Publisher
ieee
ISSN
0278-6648
Type
jour
DOI
10.1109/45.84061
Filename
84061
Link To Document