DocumentCode :
1330167
Title :
Micromotors split hairs-mechanical systems join electronics in the microscopic world
Author :
Jacobson, S.C. ; Wood, John E. ; Price, Richard H.
Author_Institution :
Utah Univ., Salt Lake City, UT, USA
Volume :
10
Issue :
1
fYear :
1991
Firstpage :
12
Lastpage :
15
Abstract :
The potential benefits of microelectromechanical systems are discussed. The problems that must be resolved in designing such systems are examined. The wobble motor is used to illustrate how innovative design can overcome some of the problems posed. Torque-speed measurements on wobble motors are described, and some potential applications are indicated.<>
Keywords :
micromechanical devices; small electric machines; torque measurement; velocity measurement; design; microelectromechanical systems; micromotors; torque-speed measurements; wobble motor; Electrodes; Electron microscopy; Electrostatics; Humans; Logic; Magnetic fields; Micromechanical devices; Micromotors; Muscles; Stators;
fLanguage :
English
Journal_Title :
Potentials, IEEE
Publisher :
ieee
ISSN :
0278-6648
Type :
jour
DOI :
10.1109/45.84061
Filename :
84061
Link To Document :
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