Transient response improvement of pneumatic isolation table by controller switching method

Active control methods are used to suppress vibrations in a pneumatic isolation table. To suppress vibrations for large displacements, it is necessary to switch control input instantaneously to the maximum or minimum input values. Therefore, active control depends on quantized input by using on-off valves is suitable. However, in servo system, there is a problem that transient response is degraded due to the influence of the integrator, and this problem is difficult to be compensated by a conventional linear control because of the discrete-valued control input caused by using the on-off valves. In this paper, this problem is solved by using a controller switching method. Effectiveness of the proposed method is verified by numerical simulations.