Design and Fabrication of a Micro-Mirror for Low-Resolution Spectroscopy

Author

Prakash, K. Ajay Giri ; Dhabai, Sanjay ; Bhattacharya, Enakshi ; Bhattacharya, Shanti

Author_Institution

Dept. of Electr. Eng., Indian Inst. of Technol., Chennai, India

Volume

11

Issue

4

fYear

2011

fDate

4/1/2011 12:00:00 AM

Firstpage

1019

Lastpage

1025

Abstract

A wide variety of MEMS micro-mirrors are being developed for various optical applications. One such application is Fourier transform spectroscopy (FTS). The design, process optimization, and fabrication of a micro-mirror for this application are presented. Large, nontilting displacements of mirrors are required to achieve high FTS resolution. Although, certain applications require lower resolution, the mirror still needs to be nontilting. In order to obtain this without using deep reactive ion etching (DRIE), the micro-mirrors were fabricated on silicon using bulk micromachining with wet chemical etching. This paper presents the process developed for fabrication of the mirror with the required specifications. In addition, results of the FTS experiments conducted with the micro-mirror will also be presented.

Keywords

Fourier transform spectroscopy; micromirrors; sputter etching; bulk micromachining; deep reactive ion etching; low resolution spectroscopy; micromirror; optical applications; process optimization; wet chemical etching; Bulk micromachining; Fourier transform spectroscopy; micro-mirrors;

fLanguage

English

Journal_Title

Sensors Journal, IEEE

Publisher

ieee

ISSN

1530-437X

Type

jour

DOI

10.1109/JSEN.2010.2065222

Filename

5582128