Densely packed pie shaped vertical-cavity surface-emitting laser array incorporating a tapered one-dimensional wet oxidation

Author

Young-Gu Ju ; Lofgreen, D. ; Fiore, A. ; Syn-Yem Hu ; Hegblom, E. ; Louderback, D. ; Sjolund, O. ; Huntington, A. ; Coldren, L.A.

Author_Institution

Dept. of Electr. & Comput. Eng., California Univ., Santa Barbara, CA, USA

Volume

12

Issue

5

fYear

2000

fDate

5/1/2000 12:00:00 AM

Firstpage

462

Lastpage

464

Abstract

Wavelength-division-multiplexing (WDM) photonic integrated emitter (PIE) vertical-cavity surface-emitting laser (VCSEL) arrays are fabricated using a post growth wet oxidation technique. High-density integration of WDM VCSEL arrays is possible by combining the technique of one-dimensional oxidation and large-scale tapered oxidation. Eight channels are integrated into a circle of 60 μm in diameter. Seven channels are found to operate as lasers. The lasing wavelengths range from 823 to 836 nm corresponding with the distance between the VCSEL mesa and the tuning trench. The successful demonstration of incorporating wet oxidation into the wavelength control of the PIE VCSEL array opens a new way of fabricating mask-defined densely packed WDM VCSEL arrays.

Keywords

III-V semiconductors; aluminium compounds; gallium arsenide; integrated optics; laser tuning; optical fabrication; optical transmitters; oxidation; quantum well lasers; semiconductor laser arrays; surface emitting lasers; wavelength division multiplexing; 60 mum; 823 to 836 nm; Al/sub 0.9/Ga/sub 0.1/As-Al/sub 0.15/Ga/sub 0.85/As; GaAs-Al/sub 0.2/Ga/sub 0.8/As; VCSEL mesa; WDM photonic integrated emitter VCSEL arrays; densely packed pie shaped vertical-cavity surface-emitting laser array; high-density integration; large-scale tapered oxidation; lasing wavelength range; mask-defined densely packed WDM VCSEL array fabrication; optical fiber LAN; post growth wet oxidation technique; tapered one-dimensional wet oxidation; tuning trench; wavelength control; Fiber lasers; Laser tuning; Optical arrays; Optical surface waves; Optical transmitters; Oxidation; Semiconductor laser arrays; Surface emitting lasers; Vertical cavity surface emitting lasers; Wavelength division multiplexing;

fLanguage

English

Journal_Title

Photonics Technology Letters, IEEE

Publisher

ieee

ISSN

1041-1135

Type

jour

DOI

10.1109/68.841253

Filename

841253