DocumentCode
1331317
Title
Photoelastic waveguides in silicon
Author
Weiss, B.L.
Volume
32
Issue
17
fYear
1996
fDate
8/15/1996 12:00:00 AM
Firstpage
1577
Lastpage
1579
Abstract
Single mode photoelastic waveguides with losses of ~16 dB/cm-1 at a wavelength of 1.523 μm in bulk silicon, using Si3N4 stressor layers on the sample surface, are reported
Keywords
integrated optics; optical waveguides; photoelasticity; refractive index; silicon; 1.523 mum; Si; Si3N4; Si3N4 stressor layers; optical losses; photoelastic waveguides; sample surface; silicon; single mode photoelastic waveguides;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:19961044
Filename
533302
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