Field Emitter Equipped With a Suppressor to Control Emission Angle

We introduce a suppressor electrode into a micro-sized field emitter to control the emission angle, as an alternative to using an aperture. The suppressor electrode is fabricated between the emission tip and the extractor by using an etch-back technique. The suppressor height is determined to be 100 nm below the tip. This structure is expected to control the emission angle to be narrower when applying a low voltage at the suppressor electrode. The emission characteristics of the fabricated device closely follow the behavior of the simulated results. It is shown that the emission angle is narrowed by applying a negative voltage at the suppressor electrode.