Title :
Hybrid integration of eight channel PD-array on silica-based PLC using micro-mirror fabrication technique
Author :
Terui, Hikaru ; Shimokozono, M. ; Yanagisawa, M. ; Hashimoto, Toshikazu ; Yamada, Y. ; Horiguchi, M.
Author_Institution :
NTT Opto-Electron. Labs., Ibaraki
fDate :
8/29/1996 12:00:00 AM
Abstract :
A novel micro-mirror for vertical optical output has been successfully fabricated in a singlemode silica-based planar lightwave circuit (PLC) on Si. An eight channel planar photodiode array was assembled on this PLC. The assembled PLC exhibited an average responsivity of 0.92 A/W and a responsivity deviation of 0.34 dB at a wavelength of 1.31 μm
Keywords :
hybrid integrated circuits; integrated optoelectronics; mirrors; optical communication equipment; optical planar waveguides; photodiodes; 1.31 micrometre; PLC; SiO2-Si; average responsivity; eight channel PD-array; micro-mirror fabrication technique; optical communication; optical hybrid ICs; responsivity deviation; singlemode planar lightwave circuit; vertical optical output;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19961091
