DocumentCode
133227
Title
Calculation of silicon antireflective microstructures for mid-infrared applications
Author
Song, Y.M. ; Chang, K.S.
Author_Institution
Dept. of Electron. Eng., Pusan Nat. Univ., Busan, South Korea
fYear
2014
fDate
1-4 Sept. 2014
Firstpage
33
Lastpage
34
Abstract
Diffraction efficiencies of antireflective microstructures (AMSs) were calculated using a rigorous coupled wave analysis (RCWA) method for mid-infrared applications. The results show the effect of height, period, and shape of AMSs on the reflection. We also discuss optimum geometry of AMSs for mid-infrared application.
Keywords
antireflection coatings; elemental semiconductors; light diffraction; light reflection; micro-optics; silicon; AMS height; AMS period; AMS shape; RCWA; Si; diffraction efficiencies; lgiht reflection; mid-infrared applications; rigorous coupled wave analysis; silicon antireflective microstructures; Broadband communication; Fabrication; Geometry; Microstructure; Reflectivity; Silicon; Substrates;
fLanguage
English
Publisher
ieee
Conference_Titel
Numerical Simulation of Optoelectronic Devices (NUSOD), 2014 14th International Conference on
Conference_Location
Palma de Mallorca
ISSN
2158-3234
Print_ISBN
978-1-4799-3681-6
Type
conf
DOI
10.1109/NUSOD.2014.6935342
Filename
6935342
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