Title :
Fabrication of Perpendicular MgO-Based Magnetic Tunnel Junctions With TbFe/FeCo Electrodes
Author :
Lin-Xiu Ye ; Ching-Ming Lee ; Jia-Mou Lee ; Jia-Hua Lin ; Jin-Zhen Liu ; Jong-Ching Wu ; Te-Ho Wu
Author_Institution :
Taiwan SPIN Res. Center, Nat. Yunlin Univ. of Sci. & Technol., Douliu, Taiwan
Abstract :
This paper reports the results obtained using TbFe and FeCo alloys as the electrodes of MgO-based perpendicular magnetic tunnel junctions (pMTJs). Without annealing treatment, the as-deposited structure showed MgO (001) crystalline texture. The tunnel magnetoresistance (TMR) ratio measured from the patterned cell of size 3 × 6 μm2 was 9.5% at room temperature. However, the coercivities of both free and fixed layers were reduced considerably due to the damage caused from the patterning process. The hysteresis loop measurements showed that the magnetic properties of the structures can still be maintained after annealing up to 350°C.
Keywords :
cobalt alloys; coercive force; electrodes; iron alloys; magnesium compounds; magnetic hysteresis; magnetic multilayers; perpendicular magnetic anisotropy; terbium alloys; tunnelling magnetoresistance; (001) crystalline texture; MgO-TbFe-FeCo; annealing; as-deposited structure; coercivities; electrodes; hysteresis loop measurements; magnetic properties; patterned cell; patterning process; perpendicular magnetic tunnel junctions; temperature 293 K to 298 K; temperature 350 degC; tunnel magnetoresistance; Coercive force; Educational institutions; Iron; Junctions; Magnetic hysteresis; Magnetic tunneling; Perpendicular magnetic anisotropy; Magnetic tunnel junctions (MTJs); perpendicular magnetic anisotropy; rare-earth-transition metal; tunnel magneto resistance (TMR);
Journal_Title :
Magnetics, IEEE Transactions on
DOI :
10.1109/TMAG.2011.2157117
