Title :
Thin Film Permeability Evaluation Based on Skin Effect Using Meander-Type Probe Up to 10.6 GHz
Author :
Yabukami, Shin ; Sato, Akira ; Takahashi, Junji ; Ozawa, Toshihiro ; Miyazawa, Y. ; Yanagi, Kenjiro ; Shimada, Yusuke ; Munakata, M. ; Shiokawa, T.
Author_Institution :
Fac. of Eng., Tohoku Gakuin Univ., Tagajo, Japan
Abstract :
A highly sensitive and broadband method of obtaining thin film permeability without limitations in sample size was developed based on the high-frequency impedance change because of skin effect. A meander-type probe (3.5 mm × 2.5 mm, 2 turns) was placed in proximity of a (Co25Fe75)90B10 film (45 mm × 25 mm, 0.53 μm thick), and the permeability was optimized by Newton-Raphson method. The measured values are in good agreements with theoretical values based on the Landau-Lifshitz-Gilbert equation up to 10.6 GHz. The proposed method shows promise for measuring the permeability of wafer-sized samples in line because it is not restricted by size limitations.
Keywords :
Newton-Raphson method; boron alloys; cobalt alloys; electric impedance; iron alloys; magnetic anisotropy; magnetic permeability; magnetic thin films; skin effect; (Co25Fe75)90B10; Landau-Lifshitz-Gilbert equation; Newton-Raphson method; high-frequency impedance; magnetic anisotropy; magnetic thin film permeability; meander-type probe; size 0.53 mum; size 25 mm; size 45 mm; skin effect; wafer-sized samples; Impedance; Magnetic resonance; Permeability; Perpendicular magnetic anisotropy; Probes; Saturation magnetization; Meander probe; skin effect; thin film permeability;
Journal_Title :
Magnetics, IEEE Transactions on
DOI :
10.1109/TMAG.2011.2158396
