Title :
Eight-channel silicon-silica hybrid thermo-optic switch with improved extinction ratio realised by UV trimming
Author :
Hashizume, Yasuaki ; Tsuchizawa, Tai ; Watanabe, Toshio ; Yamada, Koji ; Itabashi, S. ; Nasu, Y. ; Itoh, M.
Author_Institution :
NTT Photonics Labs., NTT Corp., Atsugi, Japan
Abstract :
An eight-channel thermo-optic switch with a low power consumption of 0.7 mW/channel, based on a silicon silica hybrid structure, is described. The extinction ratio is improved from 3 dB to more than 15 dB by using birefringence control with an Ar ion laser trimming technique.
Keywords :
elemental semiconductors; ion lasers; optical switches; silicon; silicon compounds; thermo-optical devices; Ar; Ar ion laser trimming technique; Si-SiO2; UV trimming; birefringence control; eight-channel silicon-silica hybrid thermooptic switch; improved extinction ratio; low power consumption; power 0.7 mW;
Journal_Title :
Electronics Letters
DOI :
10.1049/el.2010.1590
