Title :
A low-impedance coplanar waveguide using an SrTiO3 thin film for GaAs power MMIC´s
Author :
Tanabe, Mitsuru ; Nishitsuji, Mitsuru ; Anda, Yoshiharu ; Ota, Yorito
Author_Institution :
Electron. Res. Lab., Matsushita Electron. Corp., Osaka, Japan
fDate :
5/1/2000 12:00:00 AM
Abstract :
A novel structure for coplanar-waveguide transmission lines with low impedance and low loss is demonstrated in this paper. The new structure simply has a high dielectric SrTiO3 thin film underneath the coplanar conductors. Due to the high dielectric constant of SrTiO3, the coplanar line exhibited characteristic impedance as low as 18 Ω with a slot width of 5 μm and the center conductor width of 50 μm, while a conventional coplanar line on GaAs showed only 30 Ω with the same configuration. The newly developed coplanar structure is easily applicable for present GaAs monolithic-microwave integrated-circuit (MMIC) technology, especially for power MMIC´s and low-impedance devices
Keywords :
III-V semiconductors; MMIC; coplanar waveguides; dielectric thin films; electric impedance; gallium arsenide; power integrated circuits; strontium compounds; 5 micron; 50 micron; CPW transmission lines; GaAs; GaAs power MMIC; SrTiO3; SrTiO3 thin film; characteristic impedance; coplanar waveguide; high dielectric constant; high dielectric thin film; low loss; low-impedance CPW; low-impedance devices; monolithic microwave ICs; Conductive films; Coplanar transmission lines; Coplanar waveguides; Dielectric thin films; Gallium arsenide; High-K gate dielectrics; Impedance; MMICs; Power transmission lines; Propagation losses;
Journal_Title :
Microwave Theory and Techniques, IEEE Transactions on
