Title :
Electrostatic discharge in semiconductor devices: an overview
Author :
Vinson, James E. ; Liou, Juin J.
Author_Institution :
Reliability Eng. Dept., Harris Corp., Melbourne, FL, USA
fDate :
2/1/1998 12:00:00 AM
Abstract :
Electrostatic discharge (ESD) is an event that sends current through an integrated circuit (IC). This paper reviews the impact of ESD on the IC industry and details the four stages of an ESD event: (1) charge generation, (2) charge transfer, (3) device response, and (4) device failure. Topics reviewed are charge generation mechanisms, models for ESD charge transfer, electrical conduction mechanisms, and device damage mechanisms leading to circuit failure
Keywords :
electrostatic discharge; failure analysis; integrated circuit reliability; reviews; charge generation; charge transfer; device failure; device response; electrical conduction; electrostatic discharge; integrated circuit; overview; semiconductor device; Charge transfer; Circuits; Earth Observing System; Electric shock; Electrostatic discharge; Fault location; Protection; Robustness; Semiconductor devices; Voltage;
Journal_Title :
Proceedings of the IEEE
