DocumentCode
1333806
Title
Electrostatic discharge in semiconductor devices: an overview
Author
Vinson, James E. ; Liou, Juin J.
Author_Institution
Reliability Eng. Dept., Harris Corp., Melbourne, FL, USA
Volume
86
Issue
2
fYear
1998
fDate
2/1/1998 12:00:00 AM
Firstpage
399
Lastpage
420
Abstract
Electrostatic discharge (ESD) is an event that sends current through an integrated circuit (IC). This paper reviews the impact of ESD on the IC industry and details the four stages of an ESD event: (1) charge generation, (2) charge transfer, (3) device response, and (4) device failure. Topics reviewed are charge generation mechanisms, models for ESD charge transfer, electrical conduction mechanisms, and device damage mechanisms leading to circuit failure
Keywords
electrostatic discharge; failure analysis; integrated circuit reliability; reviews; charge generation; charge transfer; device failure; device response; electrical conduction; electrostatic discharge; integrated circuit; overview; semiconductor device; Charge transfer; Circuits; Earth Observing System; Electric shock; Electrostatic discharge; Fault location; Protection; Robustness; Semiconductor devices; Voltage;
fLanguage
English
Journal_Title
Proceedings of the IEEE
Publisher
ieee
ISSN
0018-9219
Type
jour
DOI
10.1109/5.659493
Filename
659493
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