Low-loss distributed MEMS phase shifter

Author

Borgioli, Andrea ; Liu, Yu ; Nagra, Amit S. ; York, Robert A.

Author_Institution

Dept. of Electr. & Comput. Eng., California Univ., Santa Barbara, CA, USA

Volume

10

Issue

1

fYear

2000

fDate

1/1/2000 12:00:00 AM

Firstpage

7

Lastpage

9

Abstract

This letter presents a one-bit low-loss K/K_a-band phase shifter circuit that employs microelectromechanical systems (MEMS) capacitors. The measured results demonstrate a delay line with a 180° phase shift/1.l7 dB loss phase shift at 25 GHz, 270° phase shift/1.69 dB loss at 35 GHz, and a return loss better than 11 dB over a 0-35-GHz band. The state-of-the-art insertion loss performance, 154°/dB at 25 GHz and 160°/dB at 35 GHz, demonstrates the potential for the implementation of a very low-loss multibit digital MEMS phase shifter

Keywords

MIMIC; MMIC phase shifters; delay lines; losses; micromachining; micromechanical devices; millimetre wave phase shifters; 1.17 dB; 1.69 dB; 25 GHz; 35 GHz; K-band; K_a-band; MEMS capacitors; delay line; distributed MEMS phase shifter; insertion loss performance; multibit digital MEMS device; phase shifter circuit; return loss; Capacitors; Circuits; Delay lines; Insertion loss; Loss measurement; Microelectromechanical systems; Micromechanical devices; Performance loss; Phase measurement; Phase shifters;

fLanguage

English

Journal_Title

Microwave and Guided Wave Letters, IEEE

Publisher

ieee

ISSN

1051-8207

Type

jour

DOI

10.1109/75.842070

Filename

842070