Title :
The Ammonothermal Crystal Growth of Gallium Nitride—A Technique on the Up Rise
Author :
Ehrentraut, Dirk ; Fukuda, Tsuguo
Author_Institution :
WPI-Adv. Inst. for Mater. Res., Tohoku Univ., Miyagi, Japan
fDate :
7/1/2010 12:00:00 AM
Abstract :
Gallium nitride (GaN) is one of the most important wide band gap semiconductor materials in modern technology with even higher expectations for future applications it is ought to play a crucial role. Among this, the growth of lattice and thermally matched GaN substrates for the GaN device technology takes an essential piece. This paper is reporting on the achievements in the ammonothermal growth technique of GaN bulk crystals. Important features specific to the ammonothermal technique are focused on. Although only a few groups (currently <; 10 worldwide) are directly involved in the development of the ammonothermal bulk crystal growth technology, partly due to the extreme technological challenges, tremendous progress over the last decade has recently resulted in the fabrication of 2 inch large, free-standing, single crystalline GaN with excellent structural perfection.
Keywords :
III-V semiconductors; crystal growth from solution; gallium compounds; semiconductor growth; solubility; wide band gap semiconductors; GaN; GaN bulk crystals; GaN device technology; GaN fabrication; ammonothermal bulk crystal growth technology; ammonothermal growth technique; gallium nitride; lattice GaN substrates; thermally matched GaN substrates; wide band gap semiconductor materials; Crystalline materials; Crystallization; Crystals; Fabrication; Gallium nitride; III-V semiconductor materials; Lattices; Semiconductor materials; Substrates; Wide band gap semiconductors; Ammonothermal method; crystal growth; gallium nitride; mineralizer;
Journal_Title :
Proceedings of the IEEE
DOI :
10.1109/JPROC.2009.2029878