DocumentCode
133690
Title
Maskless digital manufacturing of organic thin film transistor by femtosecond laser direct patterning
Author
Seung Hwan Ko
Author_Institution
Dept. Mech. Eng., Seoul Nat. Univ., Seoul, South Korea
fYear
2014
fDate
3-7 Aug. 2014
Firstpage
23
Lastpage
26
Abstract
The small volume, large variety item manufacturing has been recognized as a next generation manufacturing scheme to satisfy the various demands from the customers. As a promising manufacturing technique, laser based maskless digital patterning emerged recently. Especially, the fabrication of metal nanopatterns on various substrates, such as glass and flexible polymers, has become important for various electronic device applications. In this study, we used the direct femtosecond laser sintering of metal nanocrystals to fabricate organic thin-film transistors. This process is an ultra-high-resolution direct metal patterning method in which the metal nanocrystals are sintered with a femtosecond laser beam to form high quality metal electrodes for the bottom gated organic thin film transistors with pentacene as an active layer. Organic thin-film transistors with PFBT treatments were demonstrated showing good performance with the mobility up to 0.0173 cm2/Vs. These results indicate that the femtosecond laser sintering of metal nanocrystals can be applied to numerous applications in electronics.
Keywords
high-speed optical techniques; laser sintering; semiconductor device manufacture; thin film transistors; direct femtosecond laser sintering; electronic device; femtosecond laser direct patterning; flexible polymers; glass; laser based maskless digital patterning; maskless digital manufacturing; metal nanocrystals; metal nanopatterns fabrication; next generation manufacturing scheme; organic thin film transistors; organic thin-film transistors; ultra-high-resolution direct metal patterning; Fabrication; Laser beams; Laser sintering; Metals; Nanocrystals; Organic thin film transistors; Ultrafast electronics; Digital manufacturing; laser direct patterning; small volume & large variety manufacturing;
fLanguage
English
Publisher
ieee
Conference_Titel
World Automation Congress (WAC), 2014
Conference_Location
Waikoloa, HI
Type
conf
DOI
10.1109/WAC.2014.6935644
Filename
6935644
Link To Document