DocumentCode
1336920
Title
Electrode-induced nonuniformities in the sweeping of alpha quartz
Author
Gualtieri, J.G. ; Kosinski, J.A.
Author_Institution
USA ETDL, Fort Monmouth, NJ, USA
Volume
38
Issue
5
fYear
1991
Firstpage
486
Lastpage
493
Abstract
Infrared absorption and scanning electron microscopic techniques show that color-center and/or electrode-metal introduction into quartz is influenced by the porosity of evaporated metal electrodes. Thermal-stress relief of electrode-metal films, during sweeping, normally causes porosity. If the porosity is extensive, H introduction predominates and color-center and electrode-metal introduction mechanisms are suppressed. Samples swept with evaporated Au/Cr electrodes relying on thermal stress-induced porosity sometimes displayed these sweeping nonuniformities. Nonuniformities were not found when samples were swept using evaporated Au-Cr electrodes containing periodic stripe openings. Uniform sweeping was also obtained using magnetron-sputtered amorphous Y-Ba-Cu-O films.<>
Keywords
chemical interdiffusion; colour centres; impurity and defect absorption spectra of inorganic solids; infrared spectra of inorganic solids; porosity; quartz; scanning electron microscope examination of materials; thermal stresses; voids (solid); Au-Cr electrode; SiO/sub 2/; YBaCuO amorphous films; alpha quartz sweeping; colour centres; electrode-metal films; electron induced nonuniformities; evaporated metal electrodes; infrared absorption; magnetron sputtering; periodic stripe openings; quartz resonator; scanning electron microscopic techniques; sweeping nonuniformities; thermal stress relief; thermal stress-induced porosity; void formation; Absorption; Anodes; Artificial intelligence; Electrodes; Etching; Hydrogen; Metallization; Scanning electron microscopy; Thermal stresses; Vibrations;
fLanguage
English
Journal_Title
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
Publisher
ieee
ISSN
0885-3010
Type
jour
DOI
10.1109/58.84294
Filename
84294
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