Title :
Electrode-induced nonuniformities in the sweeping of alpha quartz
Author :
Gualtieri, J.G. ; Kosinski, J.A.
Author_Institution :
USA ETDL, Fort Monmouth, NJ, USA
Abstract :
Infrared absorption and scanning electron microscopic techniques show that color-center and/or electrode-metal introduction into quartz is influenced by the porosity of evaporated metal electrodes. Thermal-stress relief of electrode-metal films, during sweeping, normally causes porosity. If the porosity is extensive, H introduction predominates and color-center and electrode-metal introduction mechanisms are suppressed. Samples swept with evaporated Au/Cr electrodes relying on thermal stress-induced porosity sometimes displayed these sweeping nonuniformities. Nonuniformities were not found when samples were swept using evaporated Au-Cr electrodes containing periodic stripe openings. Uniform sweeping was also obtained using magnetron-sputtered amorphous Y-Ba-Cu-O films.<>
Keywords :
chemical interdiffusion; colour centres; impurity and defect absorption spectra of inorganic solids; infrared spectra of inorganic solids; porosity; quartz; scanning electron microscope examination of materials; thermal stresses; voids (solid); Au-Cr electrode; SiO/sub 2/; YBaCuO amorphous films; alpha quartz sweeping; colour centres; electrode-metal films; electron induced nonuniformities; evaporated metal electrodes; infrared absorption; magnetron sputtering; periodic stripe openings; quartz resonator; scanning electron microscopic techniques; sweeping nonuniformities; thermal stress relief; thermal stress-induced porosity; void formation; Absorption; Anodes; Artificial intelligence; Electrodes; Etching; Hydrogen; Metallization; Scanning electron microscopy; Thermal stresses; Vibrations;
Journal_Title :
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on