DocumentCode :
1337120
Title :
Hybrid 
Mach-Zehnder Interferometer Prepared by Magnetron Sputtering and its Photodarkening Effect
Author :
Tan, Wee Chong ; Chen, Qi ; Kim, Jaehyun ; Madsen, Christi
Author_Institution :
Texas A&M Univ., College Station, TX, USA
Volume :
48
Issue :
2
fYear :
2012
Firstpage :
237
Lastpage :
243
Abstract :
Several hybrid integrated As2S3 Mach-Zehnder interferometers with linear tapers and grating couplers have been successfully fabricated using magnetron sputtering on LiNbO3 substrate. It demonstrated how As2S3 waveguide can be integrated with the LiNbO3 waveguide to create a hybrid interferometer for use in chalcogenide photonics. The photo-induced changes in the group and effective index of the As2S3 waveguide were measured and compared to values reported for films prepared by thermal evaporation. These photo-induced phenomena are found to be different from those reported for As2S3 bulk glass and thermally evaporated As2S3 film.
Keywords :
Mach-Zehnder interferometers; arsenic compounds; chalcogenide glasses; diffraction gratings; integrated optics; optical couplers; optical fabrication; optical films; optical glass; optical waveguides; photochromism; sputter deposition; vacuum deposition; As2S3; LiNbO3; LiNbO3 substrate; bulk glass; chalcogenide photonics; effective index; grating couplers; hybrid integrated Mach-Zehnder interferometers; integrated waveguide; linear tapers; magnetron sputtering; photodarkening effect; photoinduced phenomena; thermal evaporation; Films; Indexes; Lithium niobate; Mach-Zehnder interferometers; Optical waveguides; Photonics; Sputtering; Chalcogenide photonics; hybrid integrated optics; magnetron sputtering; photodarkening;
fLanguage :
English
Journal_Title :
Quantum Electronics, IEEE Journal of
Publisher :
ieee
ISSN :
0018-9197
Type :
jour
DOI :
10.1109/JQE.2011.2170210
Filename :
6032060
Link To Document :
