Title :
Advanced COPNA-resin as a low temperature curing resin for high-density electronic packages
Author :
Nawa, Kazunari ; Ueda, Satoshi ; Watanabe, Hiroko
Author_Institution :
Res. & Dev. Center, Sumitomo Metals Technol. Ltd., Hyogo, Japan
fDate :
8/1/1996 12:00:00 AM
Abstract :
A novel type of low temperature curing resin for both LSI packages and high-density electronic packages was synthesized. The resin, named advanced COPNA-resin, was synthesized from naphthalene and 1,4-benzenedimethanol under an acid catalyst. The resin could be cured at lower temperature than generally used polyimide resin by more than 100°C. Beside the property of low temperature curing, the new resin exhibited attractive properties as an electronic insulating material of LSI packages and high-density packages: high glass transition temperature (250°C), low dielectric constant (εr3.1 for 1 MHz frequency), and small water absorption (0.37 wt.%). The resin could form thin films at the film thickness range from 5 to 20 μm when the spin speed range was from 1000 to 5000 rpm. The obtained thin films exhibited sufficient planarity in practical uses, and a precisely patterning property by a plasma etching method. In this paper, we also carried out the analysis for reaction process of the B-staged advanced COPNA-resin by using infrared absorption spectroscopy and 13C-NMR spectroscopy
Keywords :
NMR spectroscopy; infrared spectroscopy; integrated circuit packaging; large scale integration; permittivity; sputter etching; 250 degC; 5 to 20 micron; COPNA-resin; LSI; NMR spectroscopy; dielectric constant; electronic insulating material; glass transition temperature; high-density electronic packages; infrared absorption spectroscopy; low temperature curing resin; planarity; plasma etching method; reaction process; spin speed range; water absorption; Curing; Dielectric thin films; Electronics packaging; Infrared spectra; Large scale integration; Plasma properties; Plasma temperature; Polyimides; Resins; Spectroscopy;
Journal_Title :
Components, Packaging, and Manufacturing Technology, Part B: Advanced Packaging, IEEE Transactions on