Electrostatically Tunable Meta-Atoms Integrated With In Situ Fabricated MEMS Cantilever Beam Arrays

Two concentric split ring resonators (SRRs) or meta-atoms designed to have a resonant frequency of 14 GHz are integrated with microelectromechanical systems cantilever arrays to enable electrostatic tuning of the resonant frequency. The entire structure was fabricated monolithically to improve scalability and minimize losses from externally wire-bonded components. A cantilever array was fabricated in the gap of both the inner and outer SRRs and consisted of five evenly spaced beams with lengths ranging from 300 to 400 μm. The cantilevers pulled in between 15 and 24 V depending on the beam geometry. Each pulled-in beam increased the SRR gap capacitance resulting in an overall 1-GHz shift of the measured meta-atom resonant frequency.