Title :
Integrated sensor chip for interferometric displacement measurements
Author :
Maier, T. ; Gornik, E.
Author_Institution :
Inst. fur Festkorperelektronik, Tech. Univ. Wien, Austria
fDate :
4/27/2000 12:00:00 AM
Abstract :
A simple sensor chip incorporating a vertical cavity surface emitting laser and a monolithically integrated resonant photodetector has been developed and mounted in a self-mixing interferometer. An investigation into the effect of feedback on the laser power is presented and the applicability of the sensor for displacement measurements described
Keywords :
displacement measurement; integrated optics; laser feedback; light interferometers; light interferometry; optical sensors; photodetectors; surface emitting lasers; applicability; displacement measurements; feedback; integrated sensor chip; interferometric displacement measurements; laser power; monolithically integrated resonant photodetector; self-mixing interferometer; simple sensor chip; vertical cavity surface emitting laser;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:20000624
