DocumentCode
1340063
Title
Mechanical radio
Author
Nguyen, Clark T.-C
Volume
46
Issue
12
fYear
2009
Firstpage
30
Lastpage
35
Abstract
Micromechanical resonators are often fabricated from silicon, using techniques similar to those employed in making microelectronic circuits. Perhaps the simplest resonator that can be made this way is a beam fixed at both ends and excited using an electrode placed under the freely suspended middle portion. Oscillatory signals applied to this electrode induce vibrations in the beam.
Keywords
elemental semiconductors; integrated circuits; micromechanical resonators; silicon; mechanical radio; microelectronic circuits; micromechanical resonators; Cognitive radio; Film bulk acoustic resonators; Micromechanical devices; Roads; Surface acoustic waves; TV; Telecommunications;
fLanguage
English
Journal_Title
Spectrum, IEEE
Publisher
ieee
ISSN
0018-9235
Type
jour
DOI
10.1109/MSPEC.2009.5340247
Filename
5340247
Link To Document