• DocumentCode
    1340063
  • Title

    Mechanical radio

  • Author

    Nguyen, Clark T.-C

  • Volume
    46
  • Issue
    12
  • fYear
    2009
  • Firstpage
    30
  • Lastpage
    35
  • Abstract
    Micromechanical resonators are often fabricated from silicon, using techniques similar to those employed in making microelectronic circuits. Perhaps the simplest resonator that can be made this way is a beam fixed at both ends and excited using an electrode placed under the freely suspended middle portion. Oscillatory signals applied to this electrode induce vibrations in the beam.
  • Keywords
    elemental semiconductors; integrated circuits; micromechanical resonators; silicon; mechanical radio; microelectronic circuits; micromechanical resonators; Cognitive radio; Film bulk acoustic resonators; Micromechanical devices; Roads; Surface acoustic waves; TV; Telecommunications;
  • fLanguage
    English
  • Journal_Title
    Spectrum, IEEE
  • Publisher
    ieee
  • ISSN
    0018-9235
  • Type

    jour

  • DOI
    10.1109/MSPEC.2009.5340247
  • Filename
    5340247