DocumentCode
1340326
Title
Design automation in a subwavelength world
Volume
17
Issue
2
fYear
2000
Firstpage
120
Lastpage
126
Keywords
Circuit synthesis; Design automation; Design methodology; Electronic design automation and methodology; Inspection; Lithography; Manufacturing; Optical design; Process design; Silicon;
fLanguage
English
Journal_Title
Design & Test of Computers, IEEE
Publisher
ieee
ISSN
0740-7475
Type
jour
DOI
10.1109/MDT.2000.844341
Filename
844341
Link To Document