DocumentCode
1340893
Title
Decoupled Comb Capacitors for Microelectromechanical Tuning-Fork Gyroscopes
Author
Guo, Z.Y. ; Yang, Z.C. ; Lin, L.T. ; Zhao, Q.C. ; Cui, J. ; Chi, X.Z. ; Yan, G.Z.
Author_Institution
Nat. Key Lab. of Sci. & Technol. on Micro/Nano Fabrication, Peking Univ., Beijing, China
Volume
31
Issue
1
fYear
2010
Firstpage
26
Lastpage
28
Abstract
This letter presents a novel comb capacitor which can decouple the mechanical crosstalk between the sensing and driving modes of gyroscopes. The capacitance and electrostatic force of the comb capacitor are simulated and analyzed to verify the decoupling principle. A lateral-axis tuning-fork gyroscope is used successfully to demonstrate the decoupling capability of the comb capacitor, resulting in a nonlinearity of 0.6% with full scale of 1000 ??/s and a bias stability of 0.05 ??/s (1??) for 30 min.
Keywords
capacitors; electrostatics; gyroscopes; micromechanical devices; decoupled comb capacitors; decoupling principle; electrostatic force; lateral-axis tuning-fork gyroscope; mechanical crosstalk; microelectromechanical tuning-fork gyroscopes; Decoupling; gyroscopes; microelectromechanical (MEMS) devices;
fLanguage
English
Journal_Title
Electron Device Letters, IEEE
Publisher
ieee
ISSN
0741-3106
Type
jour
DOI
10.1109/LED.2009.2035143
Filename
5340576
Link To Document