Title :
Decoupled Comb Capacitors for Microelectromechanical Tuning-Fork Gyroscopes
Author :
Guo, Z.Y. ; Yang, Z.C. ; Lin, L.T. ; Zhao, Q.C. ; Cui, J. ; Chi, X.Z. ; Yan, G.Z.
Author_Institution :
Nat. Key Lab. of Sci. & Technol. on Micro/Nano Fabrication, Peking Univ., Beijing, China
Abstract :
This letter presents a novel comb capacitor which can decouple the mechanical crosstalk between the sensing and driving modes of gyroscopes. The capacitance and electrostatic force of the comb capacitor are simulated and analyzed to verify the decoupling principle. A lateral-axis tuning-fork gyroscope is used successfully to demonstrate the decoupling capability of the comb capacitor, resulting in a nonlinearity of 0.6% with full scale of 1000 ??/s and a bias stability of 0.05 ??/s (1??) for 30 min.
Keywords :
capacitors; electrostatics; gyroscopes; micromechanical devices; decoupled comb capacitors; decoupling principle; electrostatic force; lateral-axis tuning-fork gyroscope; mechanical crosstalk; microelectromechanical tuning-fork gyroscopes; Decoupling; gyroscopes; microelectromechanical (MEMS) devices;
Journal_Title :
Electron Device Letters, IEEE
DOI :
10.1109/LED.2009.2035143
