Title :
Circular grating coupled DBR laser with integrated focusing outcoupler
Author :
Kristjánsson, Sigurgeir ; Li, Ming ; Eriksson, Niklas ; Hagberg, Mats ; Killius, Karl-Johan ; Larsson, Anders
Author_Institution :
Dept. of Optoelectron. & Electr. Meas., Chalmers Univ. of Technol., Goteborg, Sweden
fDate :
4/1/1997 12:00:00 AM
Abstract :
We report on the fabrication and operation of a circular grating coupled, AlGaAs-InGaAs surface-emitting distributed Bragg reflector (DBR) SQW laser with an integrated focusing outcoupler. Electron beam lithography and reactive ion beam etching were used to fabricate the laser with a first-order resonant grating for optical feedback and a separate detuned, chirped second-order grating for outcoupling and focusing the beam.
Keywords :
III-V semiconductors; aluminium compounds; diffraction gratings; distributed Bragg reflector lasers; electron beam lithography; gallium arsenide; indium compounds; integrated optics; laser feedback; optical couplers; optical fabrication; optical focusing; quantum well lasers; sputter etching; surface emitting lasers; AlGaAs-InGaAs; AlGaAs-InGaAs surface-emitting DBR SQW laser fabrication; circular grating coupled DBR laser; electron beam lithography; first-order resonant grating; integrated focusing outcoupler; optical feedback; reactive ion beam etching; separate detuned chirped second-order grating; Bragg gratings; Distributed Bragg reflectors; Distributed feedback devices; Electron beams; Ion beams; Laser feedback; Lithography; Optical coupling; Optical device fabrication; Surface emitting lasers;
Journal_Title :
Photonics Technology Letters, IEEE
